High Vacuum Stainless Steel Butterfly Valve
 | High Vacuum Stainless Steel Butterfly Valve
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High Vacuum Stainless Steel Butterfly Valve：
This high vacuum butterfly valve is specially designed for vacuum systems, commonly used in vacuum pipelines, semiconductor production, chemical vacuum processes and laboratory equipment. Made of stainless steel (304/316), it provides excellent corrosion resistance and air tightness, meeting the strict requirements of high vacuum environments. Available in both lever operated and worm gear handwheel types, the valve allows quick 90-degree opening/closing with low operating torque. The flanged connection ensures stable installation and reliable sealing. Suitable for high vacuum applications, it effectively prevents air leakage and maintains the vacuum degree of the system. Sizes range from DN25 to DN300, with working pressure down to 1.3×10⁻³ Pa. It is widely used in vacuum coating, vacuum distillation, freeze drying and other high vacuum process industries.
Key Technical Specifications
| Item | Specification |
|---|---|
| Type | High Vacuum Butterfly Valve |
| Actuator | Lever / Worm Gear Handwheel |
| Nominal Size | DN25 ~ DN300 |
| Body Material | Stainless Steel 304 / 316 |
| Seat Material | FKM / Viton Rubber |
| Ultimate Vacuum | 1.3×10⁻³ Pa |
| Leakage Rate | ≤ 1.3×10⁻⁹ Pa·m³/s |
| Connection Type | Flanged |
| Working Temperature | -20℃ ~ 150℃ (Rubber Seat) |
Main Component Materials
| Valve Body: Stainless Steel 304 / 316 |
| Butterfly Disc: Stainless Steel 304 / 316 |
| Valve Stem: Stainless Steel 304 / 316 |
| Seat Seal: FKM / Viton Rubber |
1. High Vacuum Tightness: Low leakage rate ensures stable vacuum degree in high vacuum systems.
2. Corrosion Resistant Stainless Steel Construction: Suitable for corrosive gases and long-term use in harsh environments.
3. Quick 90-Degree Operation: Lever or worm gear drive for fast, low-torque opening and closing.
4. Compact Flanged Design: Easy installation and maintenance on vacuum pipelines.
5. Reliable Performance in Vacuum Processes: Ideal for vacuum coating, distillation, freeze drying and other applications.
Application Industries
This high vacuum butterfly valve is widely used in:
• Vacuum coating and sputtering systems
• Semiconductor manufacturing and processing equipment
• Chemical vacuum distillation and reaction processes
• Pharmaceutical freeze drying and lyophilization equipment
• Laboratory vacuum systems and research instruments
